Etch Process Capabilities for MEMS Fabrication. Etch processes used in MEMS fabrication depend largely on the substrate material and thin films used in building the device. . Both wet and dry chemistries may have the desired effect on the targeted material but can often cause unintended damage to underlying layers or other areas of the dev Introduction to MEMS Fabrication. ... Introduction to the Lithography Process 7. Inspection 8. Etch 9. Resist Strip ... Microsoft PowerPoint - Microfabrication.pptx A typical schematic cross-section of a MEMS bulk micromachining process is reported in figure 1.3 (a), while a Scanning Electron Microscopy (SEM) image of a physical silicon-based EH-MEMS (MEMS for Energy Harvesting) realized with such a technology , is shown in figure 1.3 (b).